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The Spin-Coating Process: Analysis of the Free Boundary Value Problem
Authors:Robert Denk  Matthias Geissert  Jürgen Saal  Okihiro Sawada
Affiliation:1. Fachbereich Mathematik und Statistik , Universit?t Konstanz , Konstanz, Germany;2. Fachbereich Mathematik, Angewandte Analysis , Technische Universit?t Darmstadt , Darmstadt, Germany;3. Center of Smart Interfaces , Technische Universit?t Darmstadt , Darmstadt, Germany
Abstract:In this paper, an accurate model of the spin-coating process is presented and investigated from the analytical point of view. More precisely, the spin-coating process is being described as a one-phase free boundary value problem for Newtonian fluids subject to surface tension and rotational effects. It is proved that for T > 0 there exists a unique, strong solution to this problem in (0, T) belonging to a certain regularity class provided the data and the speed of rotation are small enough in suitable norms. The strategy of the proof is based on a transformation of the free boundary value problem to a quasilinear evolution equation on a fixed domain. The keypoint for solving the latter equation is the so-called maximal regularity approach. In order to pursue in this direction one needs to determine the precise regularity classes for the associated inhomogeneous linearized equations. This is being achieved by applying the Newton polygon method to the boundary symbol.
Keywords:Free boundary  Navier slip  Navier–Stokes  Newton polygon  Spin-coating  Surface tension
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