快刀伺服加工多通道滤光片阵列的间隔层模具

在目标探测识别系统中，采用多通道滤光片可以提高目标与背景的信噪比，从而实现对目标信号的精准探测。基于纳米压印的阵列结构多通道滤光片制造技术，对滤光片间隔层硬模具的表面精度和结构精度具有较高的要求。根据多光谱滤光片的设计结果，基于单点金刚石车床，采用快刀伺服加工方式，实现多通道滤光片间隔层模具的高精度制造。并采用白光干涉检测技术，对模具的表面形貌进行了检测。通过分析表明，对5×5阵列结构的多通道滤光片，其加工结果与设计值吻合良好，横向尺寸精度与纵向尺寸精度均优于5%，完全满足设计要求。该技术为多通道滤光片的大规模、批量化制造提供了技术支持，同时也为非周期阵列光学元件的制造提供一种有效的手段。

Manufacturing the spacer-layer mold of multi-channel filter arrays using Fast Tool Servo

In the target detection and identification system, the signal-to-noise ratio between target and background can be improved by using multi-channel filter, so as to achieve accurate detection of target signal. The fabrication technology of multi-channel filter based on nano-imprinting has high requirements for the surface precision and structure precision of the spacer-layer mold. According to the manufacturing requirements of the spacer-layer mold of multi-channel filter array, based on the Single Point Diamond Turning (SPDT), the high-precision manufacturing of the spacer-layer mold is realized by using Fast Tool Servo (FTS). The surface morphology of the mold was detected by using White Light Interference (WLI). The analysis shows that the processing results of the multi-channel filter with 5×5 array structure are in good agreement with the design value, and the accuracy of horizontal dimension and vertical dimension are both better than 5%, which fully meet the design requirements. This technology provides technical support for the large-scale and mass manufacturing of multi-channel filters, and it also provides an effective means for the fabrication of aperiodic array optical elements.