Preparation of gold films by plasma-CVD |
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| Authors: | E Feurer H Suhr |
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| Institution: | (1) Department of Organic Chemistry, University, D-7400 Tübingen, Fed. Rep. Germany |
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| Abstract: | ThemetalorganicplasmaenhancedChemicalVapourDeposition (MOPECVD) of gold films at room temperature using dimethyl(2,4-pentane-dionato)gold(III) as starting material is reported. By adding oxygen or propene to the rf glow discharge, films of Au oxide and of a composite gold polymer, respectively, were obtained. |
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| Keywords: | 81 15 Gh 52 90 + z 68 55 + b |
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