Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test |
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Authors: | Chunfeng GuoXianyu Su Wenjing ChenBaiping Lei Fan Wu |
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Affiliation: | a Department of Opto-Electronics, Sichuan University, Chengdu 610064, China b Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China |
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Abstract: | An off-axis Ronchi test based on the phase-shifting technique is presented to measure the aspheric mirror quantitatively. In this paper, slopes of deviations from the mirror's ideal aspheric shape are derived when an off-axis point source is used. By integrating these slopes, the deviations of the shape are obtained and then the tested shape can be reconstructed. Compared with the coaxial Ronchi test, the measurement error caused by combination fringes can be avoided, and this system is more flexible. In the experiment, a marked point is used to guide the phase unwrapping procedure, which improves the accuracy of extracting corresponding phase points. In addition, the method has strong anti-noise ability. The validity of the method has been verified by both computer simulations and a preliminary experiment. |
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Keywords: | Optical testing Aspheric mirror Ronchi test 3D surface measurement Fringe analysis |
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