SDS 800 — The new data system for quantitative depth profiling of inhomogeneous samples by SIMS |
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Authors: | Stefan M Daiser Holger Frenzel Johann L Maul Christian Scholze |
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Institution: | 1. Perkin-Elmer Verkauf GmbH, Bahnhofstrasse 30, D-8011, Vaterstetten, Federal Republic of Germany 2. ATOMIKA Technische Physik GmbH, Bruckmannring 40, D-8042, Oberschlei?heim, Federal Republic of Germany
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Abstract: | More than 13 years of SIMS application field experience of numerous users of the ATOMIKA Ionmicroprobes have been the basis for the new SIMS Data System SDS 800. The hardware and software concept of the SDS 800, therefore, pays special attention to the following requirements: - Convenient set-up, modification and re-use of the measuring parameter sets for easy, time-saving operation.
- Individual parameter selection from the very broad range of SIMS measuring parameters for optimum SIMS data quality.
- Multitasking operation for simultaneous handling of SIMS measurement, data processing, data output and of auxiliary techniques.
- Simultaneous depth profile/ion image acquisition and processing to enhance data quality and to validate data interpretation.
- User-friendly data processing and output.
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