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PKA原子和SKA原子对同位素(溅射)富集度的贡献分析
引用本文:郑里平,张虎勇,王庭太,马余刚.PKA原子和SKA原子对同位素(溅射)富集度的贡献分析[J].物理学报,2004,53(5):1577-1582.
作者姓名:郑里平  张虎勇  王庭太  马余刚
作者单位:1. 中国科学院上海应用物理研究所,上海,201800;中国科学院国际材料物理中心,沈阳,110016
2. 中国科学院上海应用物理研究所,上海,201800
基金项目:国家自然科学基金 (批准号:19675 0 61,19875 0 74)资助的课题~~
摘    要:关键词

关 键 词:动量不对称性  同位素富集度  溅射  蒙特卡罗模拟  PKA原子  SKA原子
文章编号:1000-3290/2004/53(05)/1577-06

Analysis of the contributions of PKA and SKA to the isotope enrichment
Zheng Li-Ping,Zhang Hu-Yong,Wang Ting-Tai,Ma Yu-Gang.Analysis of the contributions of PKA and SKA to the isotope enrichment[J].Acta Physica Sinica,2004,53(5):1577-1582.
Authors:Zheng Li-Ping  Zhang Hu-Yong  Wang Ting-Tai  Ma Yu-Gang
Abstract:The contribution of primary knock-on atoms(PKA) or that of secondary knock-on atoms(SKA) to the zero-fluence isotope enrichment, has been analyzed with the help of Monte Carlo (MC) simulations. For low-energy and zero-fluence 63Cu 0.5 65Cu 0.5 sputtering, the present simulations show the isotope enrichment to be the contribution of the momentum asymmetry of SKA. For low-energy and zero-fluence 92Mo 0.5 100Mo 0.5 sputtering, the MC simulations of Ref.24] showed the isotope enrichment to be the contribution of PKA. However, for this sputtering, the present simulations show that the isotope enrichment is the contribution of the momentum asymmetry of PKA rather than the contribution of PKA.
Keywords:sputtering  isotope enrichment  momentum asymmetry
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