| 碳化硅纳米管二氧化氮气敏传感器的工作机理 |
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| 引用本文： | 丁瑞雪,杨银堂,刘帘曦.碳化硅纳米管二氧化氮气敏传感器的工作机理[J].半导体学报,2009,30(11):114010-4. |
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| 作者姓名： | 丁瑞雪 杨银堂 刘帘曦 |
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| 基金项目： | 国家重点基础研究发展计划 |
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| 摘 要： | The working mechanism of sensors plays an important role in their simulation and design, which is the foundation of their applications. A model of a nanotube NO2 gas sensor system is established based on an （8, 0） silicon carbide nanotube （SiCNT） with a NO2 molecule adsorbed. The transport properties of the system are studied with a method combining density functional theory （DFT） with the non-equilibrium Green＇s function （NEGF）. The adsorbed gas molecule plays an important role in the transport properties of the gas sensor, which results in the formation of a transmission peak near the Fermi energy. More importantly, the adsorption leads to different voltage current characteristics of the sensor to that with no adsorption; the difference is large enough to detect the presence of NO2 gas.
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| 关 键 词： | 二氧化氮气体 气体传感器 硅纳米管 工作机制 碳化 非平衡格林函数 吸附分子 传输特性 |
| 收稿时间： | 4/27/2009 8:22:19 PM |
| 修稿时间： | 6/22/2009 4:14:02 PM |
Working mechanism of a SiC nanotube NO2 gas sensor |
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| Ding Ruixue,Yang Yintang and Liu Lianxi.Working mechanism of a SiC nanotube NO2 gas sensor[J].Chinese Journal of Semiconductors,2009,30(11):114010-4. |
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| Authors: | Ding Ruixue Yang Yintang and Liu Lianxi |
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| Institution: | Key Laboratory of Ministry of Education for Wide Band Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China |
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| Abstract: | working mechanism SiCNT gas sensor non-equilibrium Green＇s function |
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| Keywords: | working mechanism SiCNT gas sensor non-equilibrium Green＇s function |
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