| 水含量对溶胶-凝胶SiO2增透膜结构和性能的影响 |
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| 引用本文： | 刘小林,张伟清,梁培辉.水含量对溶胶-凝胶SiO2增透膜结构和性能的影响[J].光子学报,2000,29(11):1035-1039. |
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| 作者姓名： | 刘小林 张伟清 梁培辉 |
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| 作者单位： | 1. 上海铁道大学基础部,上海,200331
2. 中国科学院上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 利用正硅酸乙脂(TEOS)的碱催化,溶胶-凝胶法制备多孔SiO2增透膜.较详细地研究了工艺参量H2O/TEOS摩尔比对薄膜结构和性能的影响.结果表明,随H2O/TEOS摩尔比的增大,薄膜厚度、折射率和致密度减小;而薄膜透射率增大.
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| 关 键 词： | H2O/TEOS摩尔比 溶胶-凝胶工艺 二氧化硅增透膜 结构及性能 |
| 收稿时间： | 1999-01-27 |
INFLUENCE OF H2O ON STRUCTURE AND PERFORMANCE OF POROUS SILICA ANTIREFLECTIVE COATINGS |
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| Liu Xiaolin,Zhang Weiqing,Liang Peihui.INFLUENCE OF H2O ON STRUCTURE AND PERFORMANCE OF POROUS SILICA ANTIREFLECTIVE COATINGS[J].Acta Photonica Sinica,2000,29(11):1035-1039. |
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| Authors: | Liu Xiaolin Zhang Weiqing Liang Peihui |
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| Institution: | 1. Department of Basic Course, Shanghai Tiedao University, Shanghai 200331;2. Shanghai Institute of Optics &; Fine Mechanics, Academia Sinica, Shanghai 201800 |
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| Abstract: | Sol-gel derived porous silica antireflective coating was prepared by the addition of ammonia catalyst.The dependence of the H2O/TEOS molar ratio on the structure and performance of the SiO2 antireflective coating was studied in detail.It is revealed that the thickness and the refractive index of the coating decrease with the increase of the H2O/TEOS molar ratio,whereas its peak transmission increases with the H2O/TEOS molar ratio. |
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| Keywords: | H2O/TEOS molar ratio Sol-gel technique Silica AR coating Structure and performances |
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