Effect of geometric nonlinearity on dynamic pull-in behavior of coupled-domain microstructures based on classical and shear deformation plate theories |
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| Authors: | SA Tajalli M Moghimi Zand MT Ahmadian |
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| Institution: | 1. School of Mechanical Engineering, Sharif University of Technology, Tehran, Iran;2. Center of Excellence in Design, Robotics and Automation, School of Mechanical Engineering, Sharif University of Technology, Tehran, Iran;1. School of Physics, Beijng Institute of Technology, Beijing, China;2. School of Science, Hebei University of Engineering, Handan, China;1. Mechanical Design and Production Dept., Faculty of Engineering, Zagazig University, Egypt;2. Centre of Nanotechnology, Zagazig University, Egypt;3. Mechanical Engineering Dept., Faculty of Engineering, King Abdulaziz University, Saudi Arabia |
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| Abstract: | This paper investigates the dynamic pull-in behavior of microplates actuated by a suddenly applied electrostatic force. Electrostatic, elastic and fluid domains are involved in modeling. First-order shear deformation plate theory and classical plate theory are used to model the geometrically nonlinear microplates. The equations of motion are descritized by the finite element method. The effects of nonlinearity, fluid pressure, initial stress and different geometric parameters on dynamic behavior are examined. In addition, the influences of initial stress and actuation voltage on oscillatory behavior of microplates are evaluated. |
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