同步辐射聚焦镜压弯机构设计与面形误差分析

基于同步辐射聚焦镜的原理,对压弯机构进行设计,对压弯理论进行介绍,并推导了压弯镜理论面形的计算过程;根据设计理论建立了基于柔性铰链的压弯机构的模型,并对压弯机构的参数进行计算,有效长度为84.9mm,最大力矩为259.8×10-3 N·m。设计并校核了压弯机构,满足了压弯机构在材料力学上的要求;最后针对压弯镜存在的理论面型误差,通过对压弯镜进行有限元仿真得到模拟值,与理论值进行对比,分析了不同的因素对面型误差的影响。

Design and surface shape error analysis of synchronous radiation focusing mirror bending mechanism

Based on the principle of synchronous radiation focusing mirror, a bending mechanism was designed, the design theory of the bending mechanism was introduced, and the calculation process of the theoretical shape of the bending mirror was deduced.Meanwhile, according to the design theory, the model of the bending mechanism based on flexible hinge was established, and its parameters were calculated, the effective length was 84.9 mm and the maximum torque was 259.8×10-3 N·m.Furthermore, the design and check of the bending mechanism were completed, showing that the material mechanics requirements of the bending mechanism could be meet. Finally, according to the error of the theoretical surface shape error, how different factors affect the variation of the surface error was analyzed by comparing the theoretical value of the bent mirror shape with the finite element simulation value.