Influence of Template Geometry on Polymer Micro-Structure Duplication in Electrohydrodynamics Patterning Process

Electrohydrodynamics patterning is a process for electrically duplicating micro–nano patterns on polymer films by applying an electrical field. An investigation into the hydraulic behavior of the polymer as affected by the template-modulated electrical field is critical for understanding the process capability and template design. A coupling model is presented to characterize the influence of template geometry on the pattern duplication. The transient simulation is carried out to study the formation of a pattern. It is proposed that the electrical field modulated by the template can be divided into a spatially nonhomogeneous component which generates the periodic pillars undesirably and a spatially nonhomogeneous component which generates a duplication of the template pattern as desired. We find that the template geometry has a significant effect on the template-modulated electrohydrodynamics. A high-fidelity duplication of pattern is better suited to a low projection ratio, a decreased template spacer height, and an increased pattern aspect ratio.