| 短波长软X射线多层膜高级次峰设计与制备 |
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| 引用本文： | 邵建达,易葵,范正修,王润文,崔明启.短波长软X射线多层膜高级次峰设计与制备[J].物理学报,1997,46(11):2258-2266. |
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| 作者姓名： | 邵建达 易葵 范正修 王润文 崔明启 |
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| 作者单位： | (1)中国科学院高能物理研究所; (2)中国科学院上海光学精密机械研究所 |
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| 摘 要： | 考虑了短波长软X射线多层膜的设计问题，比较了一、二、三级布喇格衍射峰设计的反射率结果，分析了反射率与周期厚度及金属层在周期中的比率的关系．本文认为，在存在不连续金属膜层的情况下，用布喇格衍射峰的二级次设计，有助于获得实测的反射率．给出了利用磁控溅射方法沉积的Mo/Si多层膜在4.47nm处同步辐射测量，在60°入射角下获得8.5%实测反射率的结果．
关键词：
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| 关 键 词： | 软X射线 多层膜 布喇格衍射峰 |
| 收稿时间： | 1997-01-20 |
DESIGN OF SOFT X-RAY MULTILAYERS FOR SHORTER WAVELENGTHS |
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| SHAO JIAN-DA,YI KUI,FAN ZHENG-XIU,WANG RUN-WEN and CUI MING-QI.DESIGN OF SOFT X-RAY MULTILAYERS FOR SHORTER WAVELENGTHS[J].Acta Physica Sinica,1997,46(11):2258-2266. |
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| Authors: | SHAO JIAN-DA YI KUI FAN ZHENG-XIU WANG RUN-WEN and CUI MING-QI |
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| Abstract: | This paper discussed a method of designing soft X-ray multilayers for shorter wavelengths and showed that a difference between the designing of longer wavelength soft X-ray multilayers and that of the shorter one.For the latter,the minimum continuous thickness of the metal layer have to be considered.The method of second order designing could be a way to deposit high-quality multilayer mirrors for shorter wavelengths.The measured reflectivity of a Mo/Si multilayer for 4.47nm is also reported. |
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