Stress‐enhanced dislocation density reduction in multicrystalline silicon |
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Authors: | M. I. Bertoni D. M. Powell M. L. Vogl S. Castellanos A. Fecych T. Buonassisi |
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Affiliation: | Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA |
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Abstract: | Stress is generally perceived to be detrimental for multicrystalline silicon (mc‐Si), leading to dislocation multiplication during crystal growth and processing. Herein, we evaluate the role of stress as a driving force for dislocation density reduction in mc‐Si. At high temperatures, close to the melting point (>0.8Tm), we observe that the application of stress as well as the relief of residual stress, can modify the density of pre‐existing dislocations in as‐grown mc‐Si under certain conditions, leading to a net local reduction of dislocation density. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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Keywords: | dislocations stress dislocation density 3‐point bending annealing high temperature Si |
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