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Stress‐enhanced dislocation density reduction in multicrystalline silicon
Authors:M. I. Bertoni  D. M. Powell  M. L. Vogl  S. Castellanos  A. Fecych  T. Buonassisi
Affiliation:Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
Abstract:Stress is generally perceived to be detrimental for multicrystalline silicon (mc‐Si), leading to dislocation multiplication during crystal growth and processing. Herein, we evaluate the role of stress as a driving force for dislocation density reduction in mc‐Si. At high temperatures, close to the melting point (>0.8Tm), we observe that the application of stress as well as the relief of residual stress, can modify the density of pre‐existing dislocations in as‐grown mc‐Si under certain conditions, leading to a net local reduction of dislocation density. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Keywords:dislocations  stress  dislocation density  3‐point bending  annealing  high temperature  Si
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