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Wide band gap and p‐type conductive Cu–Nb–O films
Authors:Seiji Yamazoe  Shunsuke Yanagimoto  Takahiro Wada
Affiliation:Department of Materials Chemistry, Ryukoku University, Seta, Otsu 520‐2194, Japan
Abstract:Cu–Nb–O films with a thickness of ca. 150 nm were prepared on borosilicate glass substrates using CuNbO3 ceramic target at substrate temperature of 500 °C by pulsed laser deposition. The X‐ray diffraction patterns showed that the Cu–Nb–O films were amorphous or an aggregation of fine crystals. The post‐annealed film at 300 °C in N2 gas showed 80% transmission in visible light (band gap = 2.6 eV) and high p‐type conductivity of 21 S cm–1. The Cu–Nb–O film with a thickness of 100 nm, fabricated from the target with a composition of Cu/Nb = 0.9, showed the highest p‐type conductivity of 116 S cm–1. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Keywords:p‐type conductive oxides  transparent conductive oxides  thin films  Cu−  Nb−  O
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