6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3 |
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| Authors: | Fapeng Yu Shujun Zhang Xian Zhao Duorong Yuan Qing‐ming Wang Thomas R Shrout |
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| Institution: | 1. Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA;2. State Key Lab. of Crystal Materials and Institute of Crystal Materials, Shandong University, Ji'nan 250100, P.R. China;3. State Key Lab. of Crystal Materials and Institute of Crystal Materials, Shandong University, Ji'nan 250100, P.R. ChinaPhone: +86 531 88366330;4. Department of Mechanical Engineering and Materials Science, University of Pittsburgh, Pittsburgh, PA 15260, USA |
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| Abstract: | Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa4O(BO3)3 (PrCOB) and NdCa4O(BO3)3 (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of –140 °C to 200 °C for (YXt)–1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k26 and the piezoelectric coefficient d26 were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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| Keywords: | single crystals piezoelectric resonators BAW |
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