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较低倍X射线像的灰级修正
引用本文:田地,李艳平,范国传,王微,于前洋. 较低倍X射线像的灰级修正[J]. 电子显微学报, 1999, 18(2): 238-242
作者姓名:田地  李艳平  范国传  王微  于前洋
作者单位:1. 长春科技大学信息科学与技术学院
2. 中国科学院长春光学精密机械研究所,长春,130022
摘    要:应用同型计算机直接采集电子探针X射线像,并用伪彩色显示技术进行观察。发现电子束扫描方式下的低倍X射线像存在严重失真,并且倍数越低越严重;相同倍数时,谱仪的低波段比高滤段严重;不同谱仪上迭起方向不同。极低倍X射线像已无法使用,较低倍X射线像可以进行灰级修理。修理方法是,在完全的相同的实验条件下,分别采集标样和试样中某元素的X射线像,根据标样X射线像找出各像素点的修理因子;用该修正因子对试样元素的X射

关 键 词:电子探针  扫描电镜  X射线像  数字图像处理  计算机应用

Modification of X-ray image gray scale at lower amplification
TIAN Di,LI Yan-ping,FAN Guo-chuan,WANG Wei,YU Qian-yang. Modification of X-ray image gray scale at lower amplification[J]. Journal of Chinese Electron Microscopy Society, 1999, 18(2): 238-242
Authors:TIAN Di  LI Yan-ping  FAN Guo-chuan  WANG Wei  YU Qian-yang
Abstract:X ray images of electron probe were acquired by a micro computer,and observed in colors.It was found that X ray images at low amplification in beam scanning mode were distorted seriously,the lower the amplification the more serious the distortion,the lower the wavelength on a spectrometer the more serious the distortion,and the distortion direction was different from spectrometer to spectrometer.The X ray images at extremely low amplification were unable to use,but the X ray images at lower amplification could be used with their gray scale modified.The modified method was that we acquired a X ray image of an element from a standard,and found out its distorted ratio factors,then in the same experiment condition,we acquired a X ray image of the element from a sample,and corrected its gray scale in every pixel with the distorted ratio factors.As a result,the modified image from the sample was satisfied.
Keywords:electron probe  scanning electron microscope  X ray image  digital image process  computer application
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