A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production |
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| Institution: | 1. International Iberian Nanotechnology Laboratory, Av. Mestre José Veiga, 4715-330 Braga, Portugal;2. Cornell University, 113 Philips Hall, Cornell University, Ithaca, NY 14853, USA;3. Department of Physics, Manipal Institute of Technology, Manipal Academy of Higher Education, Manipal 576 104, India |
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| Abstract: | The manufacturing conditions of a thin-film bulk acoustic resonator (FBAR) filter were investigated to obtain a high Q factor which is stable for mass production. The FBAR consist of patterned electrodes and piezoelectric films. In this study, the influence of edge shape of the films on the anti-resonance characteristics was investigated using a numerical method. Optimized shape was applied to a 2.5-GHz band resonator and filter. As a result, significant improvement of the Q factor and the insertion loss was confirmed. |
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