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Modification of the mass weighing in A3B5 automated Czochralski crystal growth techniques
Authors:S. N. Rossolenko
Abstract:Modification of weight signal of LEC, VCZ crystal growth processes based on the knowledge of the weight signal in the past during the pulling process was considered. This modification is necessary for development and improvement of the direct automated weight control in these techniques of crystal growth. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Keywords:LEC  VCZ  A3B5  crystal mass
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