Affiliation: | 1. Institute of Microelectronics & Department of Electrical Engineering, Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 70101, Taiwan;2. Department of Electronic Engineering, National University of Tainan, Tainan 700, Taiwan;3. Department of Electronic Engineering, Southern Taiwan University of Technology, Tainan 710, Taiwan;4. National Nano Device Laboratories, Tainan 74147, Taiwan;5. Micro Systems Technology Center, Industrial Technology Research Institute South, Tainan 709, Taiwan |