超短脉冲准分子激光淀积类金刚石薄膜的实验研究

利用ＫｒＦ超短脉冲激光器开展了超短脉冲激光淀积金刚石薄膜实验研究，薄膜生长速率０．０２ｎｍ／ｐｕｌｓｅ，厚度０．５－０．６μｍ，显微硬度５５ＧＰａ，光学透过率优于９０％，采用等离子本的时间－空间分辨的发射光谱技术，给出了等离子体的粒子成份以及等离子体的时间－空间的演化图像，以及在不同激光参数条件下等离子体特性的变化，发现超短脉冲激光的等离子体有能量高、持续时间短（高通量）的特点，适合类金刚石薄膜的

Deposition of Diamond-Like Carbon Film by Ultrashort Pulsed Excimer Laser

Diamond-like carbon (DLC) films have been deposited by ultrashort pulsed excimer laser (KrF 248 nm, 500 fs, 10 mJ). The film depth is 0.5 μm, the growth rate is 0.3～0.4 μm/h, the microhardness is 55 GPa, the optical tansimittance is better than 93%(580 nm～3 μm)。 With the temporal and spatial emission spectra, the property of plasma plume generated by the ultrashort pulsed laser and its variation with the laser parameters have been investigated. The velocity of plasma plume is very high (1×107 cm/s), the duration is very short (200～300 ns), so the plasma flux is intensive and this is suitable to deposit DLC and other metestable material. We have used the ion probe to measure the plasma ion flux, the result is consistent with that of the emission spectra. Under different laser parameter, DLC films were deposited and the effect of laser parameter and plasma flux on the deposited film have been compared. The characteristic of the interaction of ultrashort pulse with the target and the formation of DLC by laser plasma have been discussed.