| X射线光电子能谱 |
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| 引用本文： | 郭沁林. X射线光电子能谱[J]. 物理, 2007, 36(5): 405-410 |
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| 作者姓名： | 郭沁林 |
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| 作者单位： | 中国科学院物理研究所,北京凝聚态物理国家实验室,北京,100080 |
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| 摘 要： | X射线光电子能谱（X-ray photoelectron spectroscopy，XPS）技术也被称作用于化学分析的电子能谱（electron spectroscopy for chemical analysis，ESCA）．XPS属表面分析法，它可以给出固体样品表面所含的元素种类、化学组成以及有关的电子结构重要信息，在各种固体材料的基础研究和实际应用中起着重要的作用．文章简要介绍了XPS仪器的工作原理和分析方法，并给出了XPS在科学研究工作中的应用实例．
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| 关 键 词： | X射线光电子能谱(XPS) 电子能谱 表面分析 |
| 修稿时间： | 2007-03-08 |
X-ray photoelectron spectroscopy |
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| GUO Qin-Lin. X-ray photoelectron spectroscopy[J]. Physics, 2007, 36(5): 405-410 |
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| Authors: | GUO Qin-Lin |
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| Affiliation: | Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China |
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| Abstract: | X-ray photoelectron spectroscopy (XPS), also called electron spectroscopy for chemical analysis (ESCA), is widely used both in basic research and in analysis of materials, particularly in surface analysis. Using XPS we can obtain information on the elemental surface composition (except for H and He), and the electronic structure of the materials involved. This paper will briefly review the principle of XPS, basic qualitative and quantitative data analysis methods, and some application examples. |
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| Keywords: | X-ray photoelectron spectroscopy(XPS) electron spectroscopy surface analysis |
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