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Spectroscopic process sensors in MOVPE device production |
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| Authors: | K Haberland P Kurpas M Pristovsek J-T Zettler M Weyers W Richter |
| Institution: | Technische Universit?t Berlin, Institut für Festk?rperphysik, Sekr. PN 6-1, Hardenbergstr. 36, D-10623 Berlin, Germany, DE Ferdinand-Braun-Institut für H?chstfrequenztechnik (FBH), Rudower Chaussee 5, D-12489 Berlin, Germany, DE |
| Abstract: | Received: 21 October 1998 / Accepted: 23 October 1998 |
| Keywords: | PACS: 61 72 Vv 68 35 Fx 68 55 Ln 78 40 Fy 78 66 Fd 81 05 Ea 81 15 Gh |
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