| 一种用于光学平面面形误差绝对测量的新方法 |
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| 引用本文： | 赵华伟,王军.一种用于光学平面面形误差绝对测量的新方法[J].应用光学,1991,12(2):53-55. |
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| 作者姓名： | 赵华伟 王军 |
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| 作者单位： | 西安应用光学研究所，西安应用光学研究所 |
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| 摘 要： | 本文探讨了一种可绝对测量光学平面面形误差的新方法,利用该方法可以消除或修正干涉仪测量光学平面面形误差时所存在的固有系统误差和参考光学平面本身的面形误差,同时也对干涉仪进行了绝对校准。
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| 关 键 词： | 光学平面 面形误差 测量 |
A New Method of Absolutely Measuring the Surface Shape Error of Optical Plane |
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| Zhao Huawei Wang Jun.A New Method of Absolutely Measuring the Surface Shape Error of Optical Plane[J].Journal of Applied Optics,1991,12(2):53-55. |
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| Authors: | Zhao Huawei Wang Jun |
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| Institution: | Xian Institute of Applied Optics |
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| Abstract: | In the paper,new method of absolutely measuring the surface Shape error of optical plane is approached.By use of this method,some inherent system errors,which exist in surface Shape error of optical plane measured With an interferometer,and the surface Shape errors of a reference optical plane itself can be eliminated or corrected.In the meanwhile,the interferometer canbe be also absolately calibrated. |
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| Keywords: | optical plane surface Shape error measurement |
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