Modeling of in situ monitored laser reflectance during MOCVD growth of HgCdTe |
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Authors: | J Bajaj S J C Irvine H O Sankur Spyros A Svoronos |
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Institution: | (1) Rockwell International Science Center, 91360 Thousand Oaks, CA;(2) Department of Chemical Engineering, University of Florida, 32611 Gainesville, FL |
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Abstract: | An effective way to in situ monitor the metalorganic chemical vapor deposition (MOCVD) of HgCdTe/CdTe/ZnTe on GaAs or GaAs/Si
substrates is presented. Specular He-Ne laser reflectance was used to in situ monitor the growth rates, layer thickness, and
morphology for each layer in the grown multilayer structure. In situ monitoring has enabled precise measurements of ZnTe nucleation
and CdTe buffer layer thicknesses. Monitoring the constancy of reflectance during the thicker CdTe buffer growth where absorption
in the CdTe reduces reflectance to just the surface component has led to optimum buffer growth ensuring good quality of subsequently
grown HgCdTe. During the interdiffused multilayer process (IMP) HgCdTe growth, because multiple interfaces are present within
the absorption length, a periodic reflectance signal is maintained throughout this growth cycle. A theoretical model was developed
to extract IMP layer thicknesses from in situ recorded experimental data. For structures that required the growth of a larger
band gap HgCdTe cap layer on top of a smaller band gap active layer, in situ monitored reflectance data allowed determination
of alloy composition in the cap layer as well. Continuous monitoring of IMP parameters established the stability of growth
conditions, translating into depth uniformity of the grown material, and allowed diagnosis of growth rate instabilities in
terms of changes in the HgTe and CdTe parts of the IMP cycle. A unique advantage of in situ laser monitoring is the opportunity
to perform “interactive” crystal growth, a development that is a key to real time MOCVD HgCdTe feedback growth control. |
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Keywords: | HgCdTe in situ monitoring of growth laser reflectance MOCVD |
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