用光具组测定光栅1级角色散的研究

对用分光计测定光栅常数为1/300mm透射光栅1级角色散的方法进行了改进,给出了引入自组光具组进行测量的方法.改进后的方法充分利用自组光具组基本特性参数在较大范围内连续可调的优点,克服传统的用分光计测量方法中光路的关键参数不可调节的不足,从而提高了测量精度.自组光具组的引入,也起到使光路参数选取具有多样性和丰富光路调整内容的拓展功能.

Study on Measurement of Grating Level 1 Angular Dispersion Using Optical Group

The first order angular dispersion of transmission grating with grating constant of 1/300 mm is considered. Its measurement method based on spectrometer is improved. In the improved method, a self-assembled compound optical system is used. This method makes full use of the advantages that the basic characteristic parameters of the self-assembled compound optical system can be continuously adjusted in a larger range, so as to overcome the shortcomings that the key parameters of the light path are nonadjustable in the traditional method based on spectrometer. As a result, the measurement accuracy is improved. Furthermore, because of using the self-assembled compound optical system, the diversity of light path parameter selection is expanded, and the content of light path adjustment is enriched.