| 光学非球面的超精密加工技术及非接触检测 |
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| 引用本文： | 谢晋.光学非球面的超精密加工技术及非接触检测[J].华南理工大学学报(自然科学版),2004,32(2):94-98. |
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| 作者姓名： | 谢晋 |
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| 作者单位： | 华南理工大学,机械工程学院,广东,广州,510640 |
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| 摘 要： | 针对亚微米级及亚微米级以下的光学硬脆性非球面器件难加工问题，分析了光学非球面的形状精度和应用，讨论了其超精密加工原理和方法及非接触检测手段．结果表明，精密数控机床、硬脆性材料延性域加工原理和超精密检测是光学非球面超精密加工的技术保证．
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| 关 键 词： | 非球面 超精密加工 光学器件 非接触检测 单点金刚石切削 弧形金刚石砂轮 |
| 文章编号： | 1000-565X(2004)02-0094-05 |
| 修稿时间： | 2003年10月22 |
Super-precision Machining and Non-contact Measurement of the Aspheric Surface of Optic Parts |
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| Xie Jin.Super-precision Machining and Non-contact Measurement of the Aspheric Surface of Optic Parts[J].Journal of South China University of Technology(Natural Science Edition),2004,32(2):94-98. |
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| Authors: | Xie Jin |
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| Abstract: | Aiming at the difficulty in machining the optic pa rt with aspheric sur face, which is of high hardness/brittleness and is up to the accuracy of submicr ometer or below submicrometer, this paper analyzes the form accuracy and the app lication of the aspheric surface, the relevant fabrication principle and process , as well as the non-contact measurement means. The results indicate that the su per-precision machining of aspheric surface technically depends on precision num erically-controlled machine tools, the ductile-mode machining principle of hard and brittle materials, and the super-precision measurement. |
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| Keywords: | aspheric surface super-precision machining optic part non-contact measurement single-point diamond cutting arc diamond grindin g wheel |
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