| 具有宽调谐范围的微纳光机电系统可调谐垂直腔面发射激光器研究 |
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| 引用本文： | 关宝璐,张敬兰,任秀娟,郭帅,李硕,揣东旭,郭霞,沈光地. 具有宽调谐范围的微纳光机电系统可调谐垂直腔面发射激光器研究[J]. 物理学报, 2011, 60(3): 34206-034206 |
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| 作者姓名： | 关宝璐 张敬兰 任秀娟 郭帅 李硕 揣东旭 郭霞 沈光地 |
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| 作者单位： | 北京工业大学,光电子技术省部共建教育部重点实验室,北京 100124 |
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| 基金项目： | 国家重点基础研究发展计划(批准号:2006CB604902),国家自然科学基金(批准号:60908012) 资助的课题. |
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| 摘 要： | 基于微纳机械技术设计得到了可调谐垂直腔面发射激光器结构,将具有Al0.8Ga0.2As牺牲层结构的DBR反射镜制备成微纳光机电系统,并与多量子阱有源区光纵向耦合结构相结合.其中,微纳光机电DBR结构不再是简单的分布布拉格反射镜,而是对光波具有高调制作用的可动微纳机械反射镜系统,并在静电力作用下可以动态调谐VCSEL谐振腔的激射波长.实验结果显示,当激光器调谐电压从0 V增加到7 V时,对应激射波长将从968.8 nm蓝移到950 nm,整个调谐范围达到了18.8关键词：垂直腔面发射激光器微纳光机械波长可调谐
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| 关 键 词： | 垂直腔面发射激光器 微纳光机械 波长可调谐 |
| 收稿时间： | 2010-04-12 |
| 修稿时间： | 2010-05-05 |
Micro-nano-optical machine system tunable wavelength vertical cavity surface emitting lasers with wide tunable range |
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| Guan Bao-Lu,Zhang Jing-Lan,Ren Xiu-Juan,Guo Shuai,Li Shuo,Chuai Dong-Xu,Guo Xia,Shen Guang-Di. Micro-nano-optical machine system tunable wavelength vertical cavity surface emitting lasers with wide tunable range[J]. Acta Physica Sinica, 2011, 60(3): 34206-034206 |
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| Authors: | Guan Bao-Lu Zhang Jing-Lan Ren Xiu-Juan Guo Shuai Li Shuo Chuai Dong-Xu Guo Xia Shen Guang-Di |
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| Affiliation: | Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China;Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China;Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China;Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China;Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China;Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China;Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China;Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China |
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| Abstract: | The stucture of tunable vertical cavity surface emitting laser is obtained based on the micro-nano-mechanical technology. The DBR reflector with Al0. 8 Ga0. 2 As sacrificial layer consisted the micro-nano reflector systerm,which combines with the multi-well active region coupled structure. In addition,the structure of micro-nano-optical machine system is not only the DBR reflector,but also serves to tune the wavelength of lasing by the electrostatic force. Good laser characteristics are obtained with contin... |
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| Keywords: | vertical cavity surface emitting lasers micro-nano-optical machine system tunable wavelength |
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