345 GHz微折叠波导慢波结构的粗糙度和加工垂直度

通过理论和数值模拟方法,考虑金属粗糙度的情况下,研究了加工垂直度公差角在0~6°范围内变化时折叠波导慢波结构的工作性能,结果表明:金属波导表面的粗糙度增大时,慢波结构中电磁信号的传输损耗增大;垂直度公差角的增大也使得电磁信号的传输损耗增加,而且垂直度公差角所引起的结构变化会引起器件的电压工作点漂移、带宽降低等。

Waveguide roughness and exposure steepness for 345 GHz folded waveguide traveling wave tube

In the MEMS fabrication process of 345 GHz micro-electric vacuum folded waveguide traveling wave tube（FWG-TWT）, the surface roughness and the verticality of waveguides sidewall are two major challenges. Through theoretical analysis and numerical simulation, the paper considered the roughness and studied the changes of FWG slow wave structures performance when the vertical angle tolerance increased from 0 to 6. When the surface roughness of the waveguide became bigger, the signals transmission loss of the slow wave structure increased. When the angles tolerance increased, the signals transmission loss rose, and angle tolerance which means structure change caused the devices operating voltage drift, bandwidth reduction, etc. The results in this paper is helpful for the devices experiment and the processing.