Characteristics of an argon rf plasma: Active discharge and laminar sonic flow region

The electron density, the excitation and the gas temperatures have been obtained from optical spectrometric, microwave interferometric and thermocouple measurements in an argon rf plasma. The investigation was carried out in an active discharge and a channel region characterized by sonic laminar flow. Optical measurements of the excitation temperature were made in the 4000–5000 Å range for discharge pressures of ∼ 63–644 torr and input rf power of 42–60 kW. Excitation temperatures in the discharge ranged between ∼ 7000–10,000 K. Electron densities measured by optical and microwave techniques showed good agreement. Thermocouple measurements in the channel and N₂ rotational spectra from traces of N₂ injected in the argon, as well as gas dynamic considerations, indicated that the gas temperature in the discharge and the channel regions were 2900–4400K and 1900–3300K, respectively. These values were substantially lower than the excitation temperatures corresponding to these regions, indicating that the plasma was in a two-temperature state in both regions. Standard tests for local thermal equilibrium (LTE) showed that the first excited level of argon constituted the bottleneck level.