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四角晶相HfO2(001)表面原子和电子结构研究
引用本文:卢红亮,徐 敏,陈 玮,任 杰,丁士进,张 卫. 四角晶相HfO2(001)表面原子和电子结构研究[J]. 物理学报, 2006, 55(3): 1374-1378
作者姓名:卢红亮  徐 敏  陈 玮  任 杰  丁士进  张 卫
作者单位:复旦大学微电子学系,ASIC与系统国家重点实验室,上海 200433
基金项目:国家自然科学基金(批准号:60176013)和上海市科委重点项目(批准号:04JC14013)资助的 课题.
摘    要:采用基于第一性原理的密度泛函理论研究了四角晶相二氧化铪(t-HfO2)体相及 其(001)表面的原子几何与电子结构.理论计算结果表明,t-HfO2(001)表面不会 产生重构现象.与体相电子结构相比, t-HfO2(001)表面态密度明显高于体相态 密度.其次,表面原子的态密度更靠近费米能级(EF),价带往低能量处移动,并 有表面态产生.计算结果表明了t-HfO2表面禁带宽度明显低于体相的禁带宽度. t-HfO2(001)的表面态产生以及表面禁带宽度减小是由于Hf原子与O原子的配位 数减少,表面原子周围的环境发生变化而引起的. 关键词:密度泛函理论2(001)')" href="#">t-HfO2(001)表面电子结构

关 键 词:密度泛函理论  t-HfO2(001)  表面电子结构
收稿时间:2005-07-21
修稿时间:2005-09-05

Geometries and the electronic structures of t-HfO2 (001) surface
Lu Hong-Liang,Xu Min,Chen Wei,Ren Jie,Ding Shi-Jin and Zhang Wei. Geometries and the electronic structures of t-HfO2 (001) surface[J]. Acta Physica Sinica, 2006, 55(3): 1374-1378
Authors:Lu Hong-Liang  Xu Min  Chen Wei  Ren Jie  Ding Shi-Jin  Zhang Wei
Affiliation:Department of Microelectronics, ASIC and System State Key laboratory, Fudan University, Shanghai 200433, China
Abstract:The geometries and the electronic structures of t-HfO2 and its (001) surface have been studied by first-principle calculations using the density func tional theory (DFT). The optimized results show that the t-HfO2 (001) surface has no surface reconstruction. Compared with the bulk electronic struct ure, the density of states (DOS) of t-HfO2 (001) surface is higher th an that of the bulk. In addition, the DOS of t-HfO2 (001) surface is closer to the Fermi level. The valence band has the tendency to move toward the lower energy, resulting in the formation of a new surface state. The band gap of t-HfO2 (001) surface is much smaller than that of bulk band gap. The existence of a new surface state and the reduction of band gap are due to the r eduction of the Hf and O surface coordination which are different from the bulk atoms.
Keywords:density functional theory (DFT)   t-HfO2   electronic stru cture of surface
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