| 四光路透镜成像系统研究 |
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| 引用本文： | 许世军,任小玲. 四光路透镜成像系统研究[J]. 物理实验, 2002, 22(10): 12-16 |
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| 作者姓名： | 许世军 任小玲 |
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| 作者单位： | 1. 西安工业学院数理系,西安,710032
2. 西安工程科技学院信息控制系,西安,710048 |
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| 基金项目： | 兵器工业科研基金项目 (编号 2 2 96 82 - 3) |
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| 摘 要： | 针对现有膜厚监控系统的双平行光路系统和监测光直接照射单色仪入射狭缝的结构，提出了四光路透镜成像系统，同时采用光纤传光。实验表明它提高了膜厚监的稳定性和精度，并有较高的性能价格比，此外从理论上对多光路透镜成像系统的设计和调校进行了定量分析。
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| 关 键 词： | 四光路透镜成像系统 光纤 光路 调校 设计 光学薄膜 膜厚监控系统 |
| 文章编号： | 1005-4642(2002)10-0012-05 |
| 修稿时间： | 2002-05-28 |
Investigation of lens imaging system with quart-optical path |
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| XU Shi-jun ) REN Xiao-ling ). Investigation of lens imaging system with quart-optical path[J]. Physics Experimentation, 2002, 22(10): 12-16 |
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| Authors: | XU Shi-jun ) REN Xiao-ling ) |
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| Affiliation: | XU Shi-jun~ 1) REN Xiao-ling~ 2) |
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| Abstract: | With regard to the dual-optical path system and the structure that directly exposes monochromator pre-slit to monitoring light in current thin-film thickness monitoring control system, a quart-optical path lens imaging system and optical fibre are proposed. The experiments show that monitoring control precision and stability are increased using this design, and the property-to-price ratio is very high. Finally, design theory and regulation theory of lens imaging system with quart-optical path are formulated. |
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| Keywords: | lens imaging optical fibre optical path regulation |
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