Operation and application of a new time-of-flight e-gas secondary neutral mass spectrometer (ToF–SNMS) |
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| Authors: | M Kopnarski J Lösch L Simeonov |
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| Institution: | (1) Institute for Surface and Thin Film Analysis IFOS, Technical University of Kaiserslautern, 67663 Kaiserslautern, Germany;(2) Research Center OPTIMAS, Technical University of Kaiserslautern, 67663 Kaiserslautern, Germany;(3) Bulgarian Academy of Sciences, 1113 Sofia, Bulgaria |
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| Abstract: | The low-pressure rf plasma of a secondary neutral mass spectrometer (e-gas SNMS) was connected with a time-of-flight (ToF)
mass spectrometer for the first time. As opposed to ToF–SIMS in e-gas SNMS, the primary ion pulse cannot be used for triggering
the flight time measurement. Therefore, an extraction pulse is used which at a defined time loads an ion package from the
beam of the post-ionised particles into the ToF spectrometer. The newly developed ToF–SNMS system is described, and first
experimental results are presented. |
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| Keywords: | Mass spectrometer Plasma SNMS Time-of-flight Cluster |
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