| 高精度大口径平面镜瑞奇-康芒定量检测的精度影响因素分析 |
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| 引用本文： | 田秀云,吴时彬,伍凡,陈强,侯溪,吴永前.高精度大口径平面镜瑞奇-康芒定量检测的精度影响因素分析[J].光学技术,2007,33(4):632-634. |
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| 作者姓名： | 田秀云 吴时彬 伍凡 陈强 侯溪 吴永前 |
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| 作者单位： | 1. 广东海洋大学,广东,湛江,524088
2. 中国科学院光电技术研究所,成都,610209 |
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| 摘 要： | 针对前人的数学模型,对瑞奇角、旋转角和系统波像差这几个主要精度影响因素进行了仿真分析。结果表明:当瑞奇角的测量误差控制在0.5°以内时,对测量结果影响很小;由于平面镜的面形误差是连续和旋转对称的,所以旋转角测量误差对测量结果影响很小;当系统波像差系数的测量误差|ΔWn,m|≥0.05λ时会影响拟合精度。此仿真结果为提高大口径平面镜检测精度提供了理论依据。
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| 关 键 词： | 瑞奇-康芒 大口径平面镜 定量检测 影响因素 |
| 收稿时间： | 2006/12/25 |
Analysis of the influencing factors on Ritchey-Common quantitative measurement for large high precision fiat |
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| TIAN Xiu-yun,WU Shi-bin,WU Fan,CHEN Qiang,HOU Xi,WU Yong-qian.Analysis of the influencing factors on Ritchey-Common quantitative measurement for large high precision fiat[J].Optical Technique,2007,33(4):632-634. |
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| Authors: | TIAN Xiu-yun WU Shi-bin WU Fan CHEN Qiang HOU Xi WU Yong-qian |
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| Abstract: | In view of the mathematics model,Simulation and analysis for several main influencing factors such as measurement errors of Ritchey angle,rotation angle and wave-front aberrations is carried out. Results show that the Ritchey angle measurement error to be less than 0.5° is insensitive to the testing accuracy. If the figure errors of flat are consecutive and revolving symmetrical,influence is small to testing result. Wave-front aberrations in the event of |△Wn,m|≥0.05λ influence on fitting accuracy. The simulation result provides theory basis for improving the measurement precision of large flat. |
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| Keywords: | Ritchey-Common large plane quantitative measurement influencing factor |
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