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SOI-Based 3dB MMI Splitter |
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| Authors: | WEI Hong-zhen YU Jin-zhong LIU Zhong-li ZHANG Xiao-feng SHI Wei FANG Chang-shui |
| Institution: | 1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083, China 2. Microelectronics Center, Institute of Semiconductors, The Chinese Academy of Sciences,Beijing 100083, China 3. State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China |
| Abstract: | A type of SOI-based MMI 3dB splitter has been demonstrated. The geometry was analyzed and designed by effective index method and guide mode method. The fabrication tolerance was analyzed too. The device was fabricated and near-field output was obtained. The device shows large width tolerance, low loss and low power uniformity. |
| Keywords: | SOI multimode interference integrated optics |
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