Multiple scattering features in neon ion scattering spectra (ISS) from polycrystalline materials

A systematic investigation of multiple scattering from polycrystalline materials in ion scattering spectrometry was carried out using Ne⁺ at a scattering angle of 90° over the energy range of 100 to 2500 eV. It was found that the intensity of multi scattering shoulders increased with ion beam energy. The intensity at a given energy could be predicted on the basis of interatomic distances of the target. The larger the interatomic distance, the more intense the multi scattering shoulder. The separation of the double scattering shoulder from the binary peak decreased linearly with increasing mass, and the maximum of the shoulder to higher energies from the binary peak could be calculated by the relationship $\text{ΔE}\text{E}{}_0\text{= 0.166 ?(0.00064)M}$, where M is the mass of the target atom.