Model of ionization of atoms sputtered from solids |
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| Authors: | Z Šroubek J Zavadil F Kubec K Žďánský |
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| Institution: | Institute of Radio Engineering and Electronics, Czechoslovak Academy of Sciences, Lumumbova 1, 182 51 Prague 8, Czechoslovakia |
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| Abstract: | A new microscopical quantum-mechanical model of ionization of sputtered particles is described which takes into account electron excitations due to the atomic motions in the substrate. The substrate is represented by a simple atomic, metal-like, chain. Numerical calculations yield ionization probabilities R+ which have magnitudes close to the experimental values and have realistic velocity dependence. The function of R+ versus the sputtered atom ionization energy can be well approximated by the Maxwell-Boltzmann law with an effective temperature of about 3500 K. |
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