The determination of electron mean free paths in solids by depth and angular dependences of inelastically scattered electron spectra

A technique is presented of electron mean free path determination in solids using the spectra of backscattered electrons. The mean free path without energy loss (λ₀) in Ge, and the mean free paths for excitation of volume (λ_v) and surface (λ_s) plasmons in Al, are determined in the electron energy range E₀ = 0.1–10 kev. The depth d_s of surface plasmon localization is estimated for Al.