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Top-down approach to fiber-top cantilevers
Authors:Gavan Khashayar Babaei  Rector Jan H  Heeck Kier  Chavan Dhwajal  Gruca Grzegorz  Oosterkamp Tjerk H  Iannuzzi Davide
Institution:Department of Physics and Astronomy and LaserLaB, VU Amsterdam, Amsterdam, 1081HV, The Netherlands.
Abstract:Taking inspiration from conventional top-down micromachining techniques, we have fabricated a low mass gold fiber-top cantilever via align-and-shine photolithography. The cantilever is characterized by measuring its resonance frequency and mechanical quality factor. Our results show that the device grants mass sensitivity comparable to that reported for similar standard cantilevers. This proof-of-concept paves the way to series production of highly sensitive fiber-top devices for remote detection of biochemical substances.
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