Top-down approach to fiber-top cantilevers |
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Authors: | Gavan Khashayar Babaei Rector Jan H Heeck Kier Chavan Dhwajal Gruca Grzegorz Oosterkamp Tjerk H Iannuzzi Davide |
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Institution: | Department of Physics and Astronomy and LaserLaB, VU Amsterdam, Amsterdam, 1081HV, The Netherlands. |
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Abstract: | Taking inspiration from conventional top-down micromachining techniques, we have fabricated a low mass gold fiber-top cantilever via align-and-shine photolithography. The cantilever is characterized by measuring its resonance frequency and mechanical quality factor. Our results show that the device grants mass sensitivity comparable to that reported for similar standard cantilevers. This proof-of-concept paves the way to series production of highly sensitive fiber-top devices for remote detection of biochemical substances. |
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