Growth and real structure of diamond films synthesized on polycrystalline tungsten substrates |
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Authors: | V D Aleksandrov I V Sel’skaya |
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Institution: | (1) Donbass State Academy of Civil Engineering and Architecture, Makeevka, Ukraine |
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Abstract: | X-ray diffraction studies of diamond films obtained by chemical transport reactions at the concentrations of 2% methane and 98% hydrogen under pressures of 10.7 and 21.3 kPa showed that they are textured. The character of the texture depends on the substrate temperature. The films have {110}, {311}, or double {110} + {311} textures. It is established that the dependence of the growth rate of diamond films on the substrate temperature has maxima. The diamond films are finely dispersed and are characterized by pronounced micro-deformations and high dislocation densities. The temperature dependence of the growth rate correlates with the parameters of the real structure of the films. |
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