Correction of STM tip convolution effects in particle size and distance determination of metal-C:H films

Metal containing amorphous hydrocarbon films consist of nanometer size metallic particles in a hydrogen-carbon matrix. Scanning tunneling microscopy (STM) of Au and Pt containing amorphous C:H-films was performed in order to determine particle size- and distance distributions. To correct tip convolution effects, which lead to apparent particle enlargement and particle hiding (1) a method is presented which allows off-line STM tip radius determination by statistical analysis of apparent particle radii and thereby a correct particle radii determination. (2) A simple Monte Carlo model is proposed to compute fractions of hidden particles and their influence on particle distance distributions. Results of these evaluations are compared with results from small angle X-ray scattering (SAXS), transmission electron microscopy (TEM) and X-ray diffraction (XRD).