Practical experiences with electron gun charge-compensation during SIMS-analysis |
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| Authors: | N Reger F J Stadermann H M Ortner |
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| Institution: | Institut für Materialwissenschaft, Technische Hochschule, Petersenstrasse 23, D-64287 Darmstadt, Germany, DE
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| Abstract: | Electrical charging during SIMS-analysis (secondary ion mass spectrometry) is a severe limitation for the analysis of non-conductive samples. In most cases this charging can be compensated with the aid of an electron gun. This is an already established method to analyze insulating samples. In this work results of a systematic study of electron gun charge compensation in our CAMECA ims5f ion microprobe are described. |
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