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ZrO2/ SiO2多层膜的化学法制备研究
引用本文:杨帆,沈军,吴广明,孙骐,付甜,张志华,王珏. ZrO2/ SiO2多层膜的化学法制备研究[J]. 强激光与粒子束, 2003, 15(4): 326-330
作者姓名:杨帆  沈军  吴广明  孙骐  付甜  张志华  王珏
作者单位:同济大学波耳固体物理研究所,上海200092
基金项目:国家自然科学基金重点项目和面上项目(20133040,69978017)资助课题;863计划项目资助课题(2002A842052);上海纳米科技与产业促进中心项目(8152nm012,0159nm039)资助课题;上海市重点学科建设项目资助及上海市科技发展基金项目(02SL001)资助课题.
摘    要: 分别以ZrOCl2·8H2O 和正硅酸乙酯为原料,采用溶胶-凝胶工艺制备了性能稳定的ZrO2和SiO2溶胶。用旋转镀膜法分别在K9玻璃和单晶硅片上制备了ZrO2/ SiO2多层膜。采用溶剂替换和紫外光处理等手段,有效地解决了ZrO2/SiO2多层膜中膜层开裂和膜间渗透等问题。应用扫描电子显微镜观测了薄膜的表面和剖面微观形貌,并用椭偏仪测得薄膜的厚度和折射率,研究了薄膜厚度、折射率与热处理温度、紫外光处理时间的关系,对所获得薄膜的紫外-可见、红外光谱进行了分析。用输出波长1064nm ,脉宽15ns 的电光调Q光系统产生的强激光进行了单层膜的辐照实验,结果发现溶剂替换后激光损伤阈值有所提高。

关 键 词:溶胶-凝胶工艺  水热法  紫外光处理  激光损伤阈值  有机粘接剂
文章编号:1001-4322(2003)04-0326-05
收稿时间:2002-12-27
修稿时间:2002-12-27

Preparation of ZrO2/SiO2 multilayer films via chemical methods
yang fan,shen j un,wu guang-ming,sun qi,fu tian,zhang zhi-hua,wangj ue. Preparation of ZrO2/SiO2 multilayer films via chemical methods[J]. High Power Laser and Particle Beams, 2003, 15(4): 326-330
Authors:yang fan  shen j un  wu guang-ming  sun qi  fu tian  zhang zhi-hua  wangj ue
Affiliation:Pohl Institute of Solid S tate Physics , Tongji University , S hanghai 200092 , China
Abstract:Colloid-based multilayer coatings consisting of alternating layers of high-and low-refractive index components were deposited on K9 glass and silicon wafer substrates by Sol-Gel spin-coating method. SiO2 was used as the low-refractive index component and ZrO2 as the high-refractive index material. The colloidal suspension of ZrO2 was prepared by hydrothermal hydrolysis of ZrOCl2. The solvent in colloidal suspension of SiO2 was replaced by methoxyethanol through distillation. A high-pressure mercury lamp was used to do the irradiation treatment. SEM,IR and UV-VIS spectrophotometer were used to characterize the structure and optical properties of the films. Ellipssometry was used to study the thickness and refractive index of the films. The films were irradiated by a Q-switched Nd:YAG high power laser whose wavelength was 1064 nm and its pulse width was 15 ns. The results show that solvent-exchange and UV-irradiation are effective methods to avoid the cracking in the multilayer films and the infiltrating between the layers and improve laser damage threshold of sol-gel films.
Keywords:Sol-Gel process  Hydrothermal hydrolysis  UV-irradiation  Laser damage threshold  Organic binder
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