VUV/EUV标准探测器装置和传输标准探测器的标定

对研制的安装在合肥国家同步辐射实验室(NSRL)计量光束线上的VUV/EUV标准探测器装置进行了传输标准探测器的首次标定工作.实验选取了3个能点17.625nm,6.8nm和92nm,在这3个能点处分别标定光电二极管,得到其相应的量子效率.结果表明在同一能点多次标定结果的重复一致性很好,相对标准偏差在1%—14%的水平;但是与美国国家标准计量局(NIST)标定过的光电二极管的量子效率比较,短波17.625nm的标定结果较好,而6.8nm和92nm波长的结果差距偏大.偏差主要来自光源稳定性和光谱纯净度的影响.

VUV/EUV Primary Standard Detector Facility and Transfer Detector Calibration

A transfer standard detector was calibrated for the fist time with respect to the VUV/EUV primary standard detector built at the metrology beamline in National Synchrotron Radiation Laboratory (NSRL) at wavelength 17.625nm, 6.8nm and 92nm. The repetitively calibrated quantum efficiencies for Si photodiode are in good agreement at each wavelength with the relative accuracy of 1%-14%. But compared with the quantum efficiency from NIST, our result has good agreement at wavelength 17.625nm while poor agreement at wavelength 6.8nm and 92nm. The stability of the light source and the spectral impurity has significant effect on calibration.