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Extrinsic Base Surface Passivation in High Speed "Type-II" GaAsSb/InP DHBTs Using an InGaAsP Ledge Structure
作者姓名:刘洪刚  金智  苏永波  王显泰  常虎东  周磊  刘新宇  吴德馨
作者单位:Microwave Devices and Integrated Circuits Department, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
基金项目:Supported by the National Basic Research Program of China under Grant No 2010CB327501.
摘    要:Type-II GaAsSb/InP DHBTs with selectively-etched InGaAsP ledge structures are fabricated and characterized for the first time. The novel InGaAsP/GaAsSb/InP DHBTs with a 20nm lattice-matched GaAsSb base and a 75 nm InP collector have a dc current gain improvement by a factor of 2 and a cutoff frequency fT of 190 GHz. The InGaAsP ledge design provides a simple but effective approach to suppress the extrinsic base surface recombination and enable GaAsSb/InP DHBTs to further increase the operating frequencies and integration levels for millimeter wave applications.

关 键 词:InGaAsP  磷化铟  砷化镓  表面钝化  结构    类型  GaAsSb
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