Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation |
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Authors: | E. Abdel-Fattah |
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Affiliation: | 1. Physics Department, Faculty of Science, Zagazig University, Zagazig 44519, Egypt;2. Physics Department, College of Science, Salman bin AbdulAziz University, Al-Kharj, P.O. 83, Al-Kharj 11942, Saudi Arabia |
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