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High energy xps using a monochromated Ag Lα source: resolution,sensitivity and photoelectric cross sections
Authors:MJ Edgell  RW Paynter  JE Castle
Institution:The Surface Analysis Laboratory, Department of Materials Science and Engineering, University of Surrey, Guildford, Surrey GU2 5XH Great Britain
Abstract:Resolution, sensitivity and calibration data are presented for a novel high energy XPS source, monochromated Ag Lα radiation (hv = 2984.3 eV). Adequate resolution is attainable for good signal/noise spectra, whilst values for experimental sensitivity factors agree well with theoretical cross section values calculated by Nefedov. This allows an evaluation of ESCA 3 Mk. II transmission function up to 3000 eV, which appears to obey an approximate E?12 dependence. Monochromated Ag Lα (linewidth 1.3 eV) overcomes the problem of broad natural linewidths for high energy sources, such that chemical state information can be gained. Various new core level and Auger peaks are developed, a notable feature being the 1s core level and KLL Auger transition capability from Al through to Cl. Improved sensitivity is experienced for elements whose major peaks occur in the 1500–3000 eV BE range, whilst there is no serious reduction of sensitivity in the conventional XPS energy range.
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