| 离子辅助沉积中离子束流密度的作用 |
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| 引用本文： | 张大伟,洪瑞金,范树海,王英剑,邵建达,范正修. 离子辅助沉积中离子束流密度的作用[J]. 光子学报, 2005, 34(3): 477-480 |
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| 作者姓名： | 张大伟 洪瑞金 范树海 王英剑 邵建达 范正修 |
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| 作者单位： | 中国科学院上海光学精密机械研究所,上海,201800 |
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| 基金项目： | 863资助项目(编号8638042) |
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| 摘 要： | 测量了End-Hall离子源在不同条件下的离子束流密度，在不同离子束流密度下进行了Ar离子辅助沉积ZrO2薄膜的实验，研究了离子束流密度对薄膜折射率、晶相的影响.根据动量传递模型分析了离子束流密度对薄膜折射率的作用;根据热尖峰理论证明了一定条件下离子束流密度不会影响薄膜晶体结构.
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| 关 键 词： | 离子辅助 离子束流密度 热尖峰 晶相 |
| 收稿时间： | 2004-01-07 |
| 修稿时间： | 2004-01-07 |
The Effect of ion Current Density in ion Beam Assisted Deposition |
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| Zhang Dawei,Hong Ruijing,Fan Shuhai,Wang Yingjian,Shao Jianda,Fan Zhengxiu. The Effect of ion Current Density in ion Beam Assisted Deposition[J]. Acta Photonica Sinica, 2005, 34(3): 477-480 |
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| Authors: | Zhang Dawei Hong Ruijing Fan Shuhai Wang Yingjian Shao Jianda Fan Zhengxiu |
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| Affiliation: | Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences,Shanghai 201800 |
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| Abstract: | The ion current density (ICD) of End-Hall ion source at different conditions were determined with a Frady cup. The ZrO_2 films were deposited with different Ar+ ICD. The influence of ICD on refractive index, crystal phases, index inhomogeneity of films was studied. The effect of ICD on refractive index was analysed by a momentum transfer model. According to a thermal-spike theory, it is evidenced that the ICD didn′t influence the crystal structure of the films. |
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| Keywords: | Ion beam assisted Ion current density Thermal-spike Crystal phase |
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