静电微电机微转子接触动力学特性分析

提出静电微电机中转子和固定轴承间相互接触的数学模型，对微尺度下的接触应力和应变 特性进行理论推导，分析静电微电机几何参数、静电力、材料特性及加载电压对接触宽度、 应力和应变特性的影响，对比研究不同工况下接触宽度、接触应力和应变的变化，并就相同 的问题进行有限元分析，探讨摩擦系数对接触区von Mises应力、应变和接触压力 的影响，结果表明有限元模拟所得接触应力和应变分布与数学 模型的解析值较为相似.

Contact Dynamics of the Rotor and Bearing Hub in Electrostatic Micromotor

A mathematical model of the contact between the rotor and bearing hub of electrostatic micromotor, which actuated MEMS, is constructed to investigate the contact dynamics. It is illustrated that the contact problem of the contact stress and strain equations can be presented under the scaling effects of micro-scale. The parameters, such as the geometries of the micromotor, the electrostatic force, the material characteristics and the applied gap voltages, which are related to the contact, are discussed in detail. The discriminations between unchanged gap and maximum changed gap under different applied voltages and various materials are studied. Some results about the contact width, the contact stress and the contact strain, are compared with finite element model (FEM) solutions of an equivalent problem. The von Mises stress and strain and contact pressure for expressing the distributions are presented. The effects of different friction coefficient on the von Mises stress and strain and contact pressure are discussed. The small differences between the both methods, showing characteristic features of FEM and the theoretical assumptions, are explained.