XeCl laser ablation of yttria stabilized zirconia |
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| Authors: | F. Kokai K. Amano H. Ota F. Umemura |
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| Affiliation: | (1) Laser Laboratory, Institute of Research and Innovation, Takada, Kashiwa, 277 Chiba, Japan;(2) Tokyo Electric Power Company, Engineering Research Center, Nishi-tsutsujigaoka, Chofu, 182 Tokyo, Japan |
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| Abstract: | XeCl laser ablation of yttria stabilized zirconia (YSZ) in air and in vacuum (1.3×10–4 Pa) is studied by means of etch depth measurements, scanning electron microscopy, and X-ray photoelectron spectroscopy of ablated surfaces. Results on ablation rate, surface morphology, and surface chemical composition are discussed in terms of the influence of ambient atmosphere on the ablation process, rapid melting and solidification of ablated surfaces, and preferential removal of oxygen atoms from the YSZ surface. |
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| Keywords: | 81.40.– z 82.80.Pv |
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