| 表面具有光栅结构的sol-gel薄膜制备及衍射效率的研究 |
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| 引用本文： | 李小丽,李佛生,王珏,沈军,吴广明,倪星元. 表面具有光栅结构的sol-gel薄膜制备及衍射效率的研究[J]. 光学技术, 2001, 27(4): 324-325 |
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| 作者姓名： | 李小丽 李佛生 王珏 沈军 吴广明 倪星元 |
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| 作者单位： | 上海同济大学波耳固体物理研究所 |
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| 摘 要： | 介绍了一种在 sol- gel薄膜表面形成光栅结构的方法。用扫描电子显微镜 (SEM)表征了薄膜的表面形貌 ,用原子力显微镜 (AFM)测量了光栅结构的深度。测试了这种结构表面的衍射特性 ,并对结果进行了分析
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| 关 键 词： | sol-gel薄膜 光栅 衍射效率 |
| 文章编号： | 1002-1582(2001)04-0324-02 |
| 修稿时间： | 2000-10-23 |
Diffraction properties of sol-gel coatings with sinusoidal surface-relief gratings |
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| LI Xiao li,LI Fo sheng,WANG Jue,SHEN Jun,WU Guang ming,NI Xing yuan. Diffraction properties of sol-gel coatings with sinusoidal surface-relief gratings[J]. Optical Technique, 2001, 27(4): 324-325 |
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| Authors: | LI Xiao li LI Fo sheng WANG Jue SHEN Jun WU Guang ming NI Xing yuan |
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| Abstract: | A novel technique is developed to fabricate surface relief gratings using sol gel derived porous coatings on plastic foil substrates The micro structures are investigated using electron scanning microscopy (SEM) AFM photograph gives the depth of the gratings The diffraction properties of the gratings are reseached The +1 diffraction efficiency is found to be increased with the incident angle increasing, but it has a minimum value at 200 ,which is consistent with the calculated results |
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| Keywords: | sol gel coatings surface relief gratings diffraction efficiency |
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